MICROELECTROMECHANICAL SYSTEM SWITCH, MOTION SENSOR, AND MOTION SENSING METHOD

摘要

Provided are a microelectromechanical system switch, a motion sensor using the switch, and a motion sensing method. The microelectromechanical system comprises a substrate, an anchor (10), and a cantilever beam (11). The anchor (10) is fixed on the substrate, one end of the cantilever beam (11) is a fixed end connected to the anchor (10), and the other end of the cantilever beam (11) is a free end. The free end of the cantilever beam is connected to a mass block. At lease one side around the mass block (12) is arranged with a contact wall (13), and a gap (15) is arranged between the mass block (12) and the contact wall (13). The mass block (12) and the free end of the cantilever beam have a degree of freedom to move in the direction towards the contact wall (13). When the mass block (12) and the contact wall (13) are in contact with each other, the microelectromechanical system switch is closed. An external voltage is not required to drive the microelectromechanical system switch, which can be used in motion sensing. The switch features ultra-low power consumption, and is especially suitable for use in waking-up a work module.