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DEVICE FOR SINGLE-CRYSTAL GROWTH AND METHOD OF SINGLE-CRYSTAL GROWTH

机译:单晶生长装置和单晶生长方法

摘要

[Technical Problem];It is an object to provide a device for a single-crystal growth and a method of a single-crystal growth in which even when materials that are different in, for example, a melting point or a diameter are to be grown, the conditions for the stable growth of a single crystal can be obtained and a high-quality single crystal having a desired diameter can hence be grown. In addition, the device and the method have a reduced fluctuation of heating intensity to facilitate a crystal growth.;[Solution of Problem];A device for a single-crystal growth is provided with a raw material rod (14) that is supported by an upper crystal driving shaft (8), a seed crystal rod (16) that is supported by a lower crystal driving shaft (12), and a heating means, and a contact part of the raw material rod (14) with the seed crystal rod (16) is heated with a heating means to form a melting zone (18) and grow a single crystal. The device is characterized in that the heating means is configured by a plurality of rectangular beams produced by lasers (2a, . . . 2e) which emit a laser light having the equivalent irradiation intensity and by an optical means, the heating means being disposed in a circumferential direction of the melting zone (18).
机译:[技术问题];目的是提供一种用于单晶生长的装置和一种单晶生长的方法,其中,即使当例如熔点或直径不同的材料也要用作单晶生长时,该单晶生长的装置和方法也是如此。通过生长,可以得到稳定生长单晶的条件,因此可以生长具有所需直径的高质量单晶。另外,该装置和方法具有减小的加热强度波动,以促进晶体生长。[问题的解决方案]用于单晶生长的装置设置有原材料棒( 14 )由上晶体驱动轴( 8 )支撑,籽晶棒( 16 )由下晶体驱动轴()支撑12(B ),加热装置和原料棒( 14 )与籽晶棒( 16 )的接触部分被加热。加热是指形成一个熔化区( 18 )并生长出单晶。该装置的特征在于,加热装置由激光( 2 a ,... 2 < I> e )通过光学装置发射具有相同辐照强度的激光,加热装置沿熔化区( 18 )的圆周方向设置。

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