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Method of joining components for a composite showerhead electrode assembly for a plasma processing apparatus
Method of joining components for a composite showerhead electrode assembly for a plasma processing apparatus
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机译:连接用于等离子处理设备的复合喷头电极组件的组件的方法
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摘要
A showerhead electrode for a plasma processing apparatus includes an interface gel between facing surfaces of an electrode plate and a backing plate. The interface gel maintains thermal conductivity during lateral displacements generated during temperature cycling due to mismatch in coefficients of thermal expansion. The interface gel comprises, for example, a silicone based composite filled with aluminum oxide microspheres. The interface gel can conform to irregularly shaped features and maximize surface contact area between mating surfaces. The interface gel can be pre-applied to a consumable upper electrode.
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