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Semiconductor device with vertical current flow and low substrate resistance and manufacturing process thereof

机译:具有垂直电流和低衬底电阻的半导体器件及其制造工艺

摘要

A semiconductor device with vertical current flow includes a body having a substrate made of semiconductor material. At least one electrical contact on a first face of the body. A metallization structure is formed on a second face of the body, opposite to the first face. The metallization structure is provided with metal vias, which project from the second face within the substrate so as to form a high-conductivity path in parallel with portions of said substrate.
机译:具有垂直电流的半导体器件包括具有由半导体材料制成的基板的主体。主体的第一面上的至少一个电触点。金属化结构形成在主体的与第一面相对的第二面上。金属化结构设置有金属通孔,该金属通孔从衬底内的第二面突出,以形成与所述衬底的部分平行的高电导率路径。

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