Reversed-polarity pulse generating circuit for direct current plasma and direct current plasma power supply unit

摘要

A capacitor is connected between direct current voltage terminals, and inductance means is connected between one end of the capacitor and one of load terminals. In a case in which the direct current voltage exceeds a set value, voltage at both ends of the capacitor is shared by the first and second switching elements that are not electrically conductive; in a case in which the direct current voltage is below the set value, the first and second switching elements are electrically conductive on a periodic basis or as needed to output reversed-polarity voltage between load terminals; and in a case in which the first and second switching elements are turned off, voltage at both ends of the capacitor restricts voltage applied to both ends of the first and second switching elements, during a period in which the first and second feedback rectifier elements are electrically conductive.