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Template treatment method, program, computer storage medium, template treatment apparatus and imprint system
Template treatment method, program, computer storage medium, template treatment apparatus and imprint system
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机译:模板处理方法,程序,计算机存储介质,模板处理设备和压印系统
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摘要
In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template.
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