首页>
外国专利>
Antireflective coating composition, antireflective coating, and patterning process
Antireflective coating composition, antireflective coating, and patterning process
展开▼
机译:抗反射涂料组合物,抗反射涂料和图案化方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A composition comprising (A) a fluorinated polymer having k=0.01-0.4 and n=1.4-2.1 and (B) an aromatic ring-bearing polymer having k=0.3-1.2 is used to form an antireflective coating. The ARC-forming composition can be deposited by the same process as prior art ARCs. The resulting ARC is effective in preventing reflection of exposure light in photolithography and has an acceptable dry etching rate.
展开▼