首页>
外国专利>
Method and system of evaluating distribution of lattice strain on crystal material
Method and system of evaluating distribution of lattice strain on crystal material
展开▼
机译:评价晶体材料上晶格应变分布的方法和系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
A crystal material lattice strain evaluation method includes illuminating a sample having a crystal structure with an electron beam in a zone axis direction, and selectively detecting a certain diffracted wave diffracted in a certain direction among a plurality of diffracted waves diffracted by the sample. The method further includes repeating the illuminating step and the selectively detecting step while scanning the sample, and obtaining a strain distribution image in a direction corresponding to the certain diffracted wave from diffraction intensity at each point of the sample.
展开▼