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Method for replicating optical elements, particularly on a wafer level, and replicas formed thereby
Method for replicating optical elements, particularly on a wafer level, and replicas formed thereby
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机译:用于复制光学元件的方法,特别是在晶圆级复制光学元件的方法,以及由此形成的复制品
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摘要
Integrated multiple optical elements may be formed by bonding substrates containing such optical elements together or by providing optical elements on either side of the wafer substrate. The wafer is subsequently diced to obtain the individual units themselves. The optical elements may be formed lithographically, directly, or using a lithographically generated master to emboss the elements. Alignment features facilitate the efficient production of such integrated multiple optical elements, as well as post creation processing thereof on the wafer level.
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