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Oxide semiconductor thin film transistor, method of manufacturing the same, and organic electroluminescent device including the same
Oxide semiconductor thin film transistor, method of manufacturing the same, and organic electroluminescent device including the same
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机译:氧化物半导体薄膜晶体管,其制造方法以及包括该氧化物半导体薄膜晶体管的有机电致发光器件
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摘要
A thin film transistor including: a substrate; a gate electrode formed on the substrate; a gate insulating layer formed on the gate electrode and exposed portions of the substrate; an oxide semiconductor layer formed on the gate insulating layer to correspond to the gate electrode, and comprising an HfInZnO-based oxide semiconductor, wherein the oxide semiconductor layer has a Zn concentration gradient; and source and drain regions respectively formed on both sides of the oxide semiconductor layer and the gate insulating layer.
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