METHOD FOR COATING MICROMECHANICAL PARTS WITH HIGH TRIBOLOGICAL PERFORMANCES FOR APPLICATION IN MECHANICAL SYSTEMS

摘要

Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate (4) component to be coated; providing said component with a diamond coating (1); wherein diamond coating is provide by CVD in a reaction chamber and during CVD deposition, during the last portion of the growth process, a controlled change of the carbon content within the reaction chamber is provided, thereby providing a change of the sp2/sp3 carbon bonds (2) in the vicinity of the surface. Corresponding micromechanical components are also provided. Figure 3