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METHOD FOR COATING MICROMECHANICAL PARTS WITH HIGH TRIBOLOGICAL PERFORMANCES FOR APPLICATION IN MECHANICAL SYSTEMS

机译:在机械系统中应用具有高摩擦性能的微机械零件的方法

摘要

The invention - Providing a substrate (4) part to be coated ; And - According to the coating method of the micro- mechanical systems , micro- mechanical components for watch movement , including in particular the steps which provide diamond coating (1) is in the part , - The diamond coating (1) is provided by the CVD reaction chamber in the , - CVD deposition of , in the end of the growth process , by being provided with a control change in the carbon content in the reaction chamber , sp in the surface vicinity 2 / sp 3 carbon ( 2) micro- mechanical system characterized in that it provides a change in the coupling , and more particularly to a coating method of the micro- mechanical components for watch movement . ;
机译:本发明-提供一种待涂覆的基底(4)部分;并且-根据微机械系统的涂覆方法,用于手表机芯的微机械部件,特别是其中包括提供金刚石涂层(1)的步骤,-金刚石涂层(1)由部件提供。在生长过程的最后,通过控制反应室中碳含量的变化,在表面附近的 2 / sp 3 碳(2)微机械系统的特征在于,它提供了联轴器的一种变化,尤其是一种用于手表机芯的微机械部件的涂覆方法。 ;

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