首页> 外国专利> CARBON-BASED THIN FILM, PROCESS FOR PRODUCING THE SAME AND MEMBER USING THE THIN FILM

CARBON-BASED THIN FILM, PROCESS FOR PRODUCING THE SAME AND MEMBER USING THE THIN FILM

机译:基于碳的薄膜,使用该薄膜生产相同和成员的过程

摘要

The present invention provides a novel carbon-based material in whichcarbons different in property are combined in such a manner as to beapplicable toa device. The carbon-based thin film provides a carbon-based thin film 10including first phases 1 that contain amorphous carbon and extend in a filmthickness direction, and a second phase 2 that contains a graphite structureandintervenes between the first phases 1. In the thin film, at least one selectedfromthe group consisting of the following a) to e) is satisfied: a) the secondphasecontains more graphite structures per unit volume than the first phases; b) adensity of the second phase is larger than that of the first phases; c) anelectricresistivity of the second phase is lower than that of the first phases; d) anelasticmodulus of the second phase is higher than that of the first phases; and e) inthesecond phase, a basal plane of the graphite structure is oriented along thefilmthickness direction.
机译:本发明提供了一种新颖的碳基材料,其中将性质不同的碳组合成适用于一个装置。碳基薄膜提供碳基薄膜10包括含有非晶碳并在薄膜中延伸的第一相1厚度方向,以及包含石墨结构的第二相2和在第一阶段之间进行干预1.在薄膜中,至少选择一个从满足以下a)到e)的组:a)第二个相与第一相相比,每单位体积包含更多的石墨结构; b)一个第二相的密度大于第一相的密度。能够电动第二相的电阻率低于第一相的电阻率。 d)一个有弹性第二相的模量高于第一相的模量。和e)在的第二阶段,石墨结构的基面沿着电影厚度方向。

著录项

  • 公开/公告号CA2556782C

    专利类型

  • 公开/公告日2013-06-04

    原文格式PDF

  • 申请/专利权人 JAPAN SCIENCE AND TECHNOLOGY AGENCY;

    申请/专利号CA20052556782

  • 发明设计人 IWAMURA EIJI;

    申请日2005-02-25

  • 分类号C23C14/00;B82B1/00;C01B31/02;

  • 国家 CA

  • 入库时间 2022-08-21 16:38:21

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