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Carbon-Based Thin Film, and Process for Producing the Same, and Member Using Thin Film

机译:碳基薄膜及其制造方法和使用该薄膜的构件

摘要

The present invention provides a novel carbon-based material in which carbons different in property are combined in such a manner as to be applicable to a device. The carbon-based thin film provides a carbon-based thin film 10 including first phases 1 that contain amorphous carbon and extend in a film thickness direction, and a second phase 2 that contains a graphite structure and intervenes between the first phases 1. In the thin film, at least one selected from the group consisting of the following a) to e) is satisfied: a) the second phase contains more graphite structures per unit volume than the first phases; b) a density of the second phase is larger than that of the first phases; c) an electric resistivity of the second phase is lower than that of the first phases; d) an elastic modulus of the second phase is higher than that of the first phases; and e) in the second phase, a basal plane of the graphite structure is oriented along the film thickness direction.
机译:本发明提供了一种新颖的碳基材料,其中性质不同的碳以适用于装置的方式结合。碳基薄膜提供包括第一相 1 和第二相的碳基薄膜,所述第一相包含无定形碳并在膜厚方向上延伸。 > 2 包含石墨结构并且介于第一相 1之间。在薄膜中,满足从以下a)到e)组成的组中选择的至少一个: a)与第一相相比,第二相每单位体积含有更多的石墨结构; b)第二相的密度大于第一相的密度; c)第二相的电阻率低于第一相的电阻率; d)第二相的弹性模量高于第一相的弹性模量; e)在第二阶段中,石墨结构的基面沿着膜厚方向取向。

著录项

  • 公开/公告号US2008038511A1

    专利类型

  • 公开/公告日2008-02-14

    原文格式PDF

  • 申请/专利权人 IWAMURA EIJI;

    申请/专利号US20050590105

  • 发明设计人 IWAMURA EIJI;

    申请日2005-02-25

  • 分类号C23C14/00;B82B1/00;C01B31/02;

  • 国家 US

  • 入库时间 2022-08-21 20:14:00

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