ABERRATION-CORRECTING DARK-FIELD ELECTRON MICROSCOPY

摘要

A transmission electron microscope includes an electron beam source (20) to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector (90) corrects the electron beam for at least a spherical aberration. A specimen holder is provided to hold a specimen (40) in the path of the electron beam. A detector (80) is used to detect the electron beam transmitted through the specimen. The transmission electron microscope operates in a dark- field mode in which a zero beam of the electron beam is not detected. The microscope may also be capable of operating in an incoherent illumination mode.