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CONSTRUCTION OF REFERENCE SPECTRA WITH VARIATIONS IN ENVIRONMENTAL EFFECTS
CONSTRUCTION OF REFERENCE SPECTRA WITH VARIATIONS IN ENVIRONMENTAL EFFECTS
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机译:环境影响变化的参考谱的构建
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摘要
A method of generating a library of reference spectra includes storing at least one reference spectrum, storing a plurality of different transmission curves, and for at least two transmission curves from the plurality of different transmission curves, calculating a modified reference spectrum from the reference spectrum and the transmission curve to generate a plurality of modified reference spectra. The transmission curves represent distortion to a spectrum introduced by variations in components in an optical path before a substrate surface.
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