METHOD FOR MANUFACTURING SUBSTRATE FOR LIGHT EMITTING DIODE, SUBSTRATE FOR LIGHT EMITTING DIODE MANUFACTURED THEREBY, AND METHOD FOR MANUFACTURING LIGHT EMITTING DIODE PROVIDED WITH SUBSTRATE FOR LIGHT EMITTING DIODE

摘要

The present invention relates to a method for manufacturing a substrate for a light emitting diode, a substrate for a light emitting diode manufactured thereby, and a method for manufacturing a light emitting diode provided with the substrate for a light emitting diode. The method for manufacturing a substrate for a light emitting diode, according to the present invention, comprises the steps of: coating the upper surface of a predetermined substrate member with a nanostructure, which comprises a material that is easier for dry etching than the substrate member; forming an upper surface uneven portion on the upper surface of the substrate member by dry etching the nanostructure and the substrate member, using the nanostructure as a mask; coating the lower surface of the substrate member with the nanostructure; and forming a lower surface uneven portion on the lower surface of the substrate member by dry etching the nanostructure and the substrate member, using the nanostructure as the mask. The present invention makes it possible to manufacture the substrate for a light emitting diode, which is provided with the uneven portion that is easily formed by coating the nanostructure and using same as the mask for dry etching, instead of using photolithography patterning, which has a high manufacturing cost and is complicated, and thus to reduce manufacturing time and cost of the substrate for a light emitting diode.