INTERPENETRATING POLYMER NETWORK STRUCTURE AND POLISHING PAD AND PROCESSES FOR PRODUCING THEM

摘要

This invention provides a process for producing an interpenetrating polymer network structure, comprising the steps of impregnating a radical polymerizable composition containing an ethylenically unsaturated compound and a radical polymerizable initiator into a polymer molded product and polymerizing the ethylenically unsaturated compound under such a state that the polymer molded product impregnated with the radical polymerizable composition has been swollen. In this process, before the step of impregnating the radical polymerizable composition into the polymer molded product, a chain transfer agent and/or a radical polymerization inhibitor are added to the radical polymerizable composition and/or the polymer molded product. This process can provide a highly uniform interpenetrating polymer network structure. There are also provided a polishing pad, which is high in in-plane uniformity of the polishing speed during the polishing, has excellent flattening properties, and has an improved pad life in the polishing, and a process for producing the same.