PRODUCTION METHOD USING DRY ETCHING OF GLASS SUBSTRATE HAVING CONCAVE-CONVEX FILM, GLASS SUBSTRATE HAVING CONCAVE-CONVEX FILM, SOLAR CELL, AND PRODUCTION METHOD FOR SOLAR CELL

摘要

[Problem] To provide: a production method using dry etching of a glass substrate having a concave-convex film, whereby a detailed concave-convex structure using dry etching can be precisely applied; a glass substrate having a concave-convex film; a solar cell; and a production method for a solar cell. [Solution] A production method using dry etching of a glass substrate having a concave-convex film, configured such that a detailed concave-convex structure is precisely applied using dry etching, and such that said method includes: a step for forming a film to be worked, in which a film to be worked configured from a single material is formed on a flat surface of a glass substrate, when applying a concave-convex structure to the glass substrate comprising a plurality of oxides each having different vapor pressure during dry etching; and a concave-convex structure forming step in which a periodically concave-convex structure is formed, by dry etching, on the surface of the film to be worked.