Manufacturing method using the dry etching of a glass substrate having concave-convex structure film, a glass substrate having concave-convex structure film, a solar cell, and method for manufacturing the solar cell

摘要

The The present invention accurately fine uneven structure can be imparted by dry etching manufacturing method using dry etching of a glass substrate having concave-convex structure film, a glass substrate having concave-convex structure film, a solar cell, and to provide a manufacturing method of the solar cell. As we A vapor pressure during dry etching to grant the glass substrate to the uneven structure consisting of a plurality of different oxide each other, on a flat surface of a glass substrate to form a film to be processed consist of a single material a workpiece film forming step, the surface of the film to be processed, a periodic uneven structure is to include a concavo-convex structure forming step of forming by dry etching, so that high precision fine uneven structure is given by dry etching I was in. .BACKGROUND 1