Bulk acoustic wave resonator with partially filled cavities

摘要

The method involves measuring frequency of a resonator, where the resonator comprises a resonating element (28) constituted of a body formed of a part made of a conductive material. Cavities of the body are partially filled with filling materials forming a thin layer (50), where the cavities are pits drilled in a part of thickness of the resonating element. The cavities of the body are provided open on a surface of the resonating element. The filling materials are chosen from silicon, germanium, silicon-germanium, ruthenium, iridium, platinum, zinc selenide, silicon oxide, aluminum oxides, titanium oxides, zinc oxides, hafnium nitride, silicon nitride, titanium nitride, tantalum nitride, tungsten, niobium, siliconoxynitride and zinc sulfide. An independent claim is also included for a resonator comprising a resonating element having a body with a column made of a material.