首页> 外国专利> METHOD AND APPARATUS FOR GROWING INDIUM OXIDE (In203) SINGLE CRYSTALS AND INDIUM OXIDE (In203) SINGLE CRYSTAL

METHOD AND APPARATUS FOR GROWING INDIUM OXIDE (In203) SINGLE CRYSTALS AND INDIUM OXIDE (In203) SINGLE CRYSTAL

机译:生长氧化铟(In203)单晶和氧化铟(In203)单晶的方法和装置

摘要

A method and apparatus for growing truly bulk ln2O3 single crystals from the melt, as well as melt-grown bulk ln2O3 single crystals are disclosed. The growth method comprises a controlled decomposition of initially non-conducting ln2O3 starting material (23) during heating-up of a noble metal crucible (4) containing the ln2O3 starting material (23) and thus increasing electrical conductivity of the ln2O3 starting material with rising temperature, which is sufficient to couple with an electromagnetic field of an induction coil (6) through the crucible wall (24) around melting point of ln2O3. Such coupling leads to an electromagnetic levitation of at least a portion (23.1) of the liquid ln203 starting material with a neck (26) formation acting as crystallization seed. During cooling down of the noble metal crucible (4) with the liquid ln2O3 starting material at least one bulk ln2O3 single crystal (28.1, 28.2) is formed. We named this novel crystal growth method the "Levitation-Assisted Self-Seeding Crystal Growth Method". The apparatus for growing bulk ln2O3 single crystals from the melt comprises an inductively heated thermal system with a noble metal crucible (4) and evacuation passages (22, 22.1) for gaseous decomposition products of ln2O3, while keeping very low temperature gradients. Various configurations of the induction coil (6), the noble metal crucible (4) and a lid (12) covering the crucible can be utilized to obtain very low temperature gradients, sufficient evacuation passages and a high levitation force. The electrical properties of the melt grown ln2O3 single crystals can be modified in a wide range by at least one heat treatment in suitable atmospheres and appropriate temperatures.
机译:一种从熔体中生长真正的In 2 O 3 单晶以及熔体生长的In 2 O <公开了Sub> 3 单晶。该生长方法包括在加热包含ln的贵金属坩埚(4)的过程中对初始不导电的ln 2 O 3 起始材料(23)的受控分解 2 O 3 原材料(23),从而通过以下方法提高ln 2 O 3 原材料的电导率温度升高,足以与感应线圈(6)的电磁场通过坩埚壁(24)在ln 2 O 3 的熔点附近耦合。这种耦合导致液体ln 2 O 3起始材料的至少一部分(23.1)发生电磁悬浮,其颈部(26)形成结晶晶种。在使用液态ln 2 O 3 原料冷却贵金属坩埚(4)期间,至少有一个本体ln 2 O 3 单晶(28.1、28.2)。我们将这种新颖的晶体生长方法称为“悬浮辅助自种晶体生长方法”。用于从熔体中生长大块ln 2 O 3 单晶的设备包括感应加热的热系统,该系统具有贵金属坩埚(4)和排气通道(22,22.1) ln 2 O 3 的气态分解产物,同时保持非常低的温度梯度。可以利用感应线圈(6),贵金属坩埚(4)和覆盖坩埚的盖(12)的各种构造来获得非常低的温度梯度,足够的排气通道和高的悬浮力。熔融生长的ln 2 O 3 单晶的电学性质可以通过在适当的气氛和适当的温度下至少进行一次热处理而在很宽的范围内改变。

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