SELECTIVE ALIGNMENT GROWTH METHOD OF A ZINC OXIDE NANO PILLAR ARRAY CAPABLE OF IMPORVING PORTABILITY

摘要

PURPOSE: A selective alignment growth method of a zinc oxide nano pillar array is provided to produce a soft device by utilizing a one-dimension nanostructure and to improve interface adhesive force of a zinc oxide nano pillar.;CONSTITUTION: The surface of a substrate(1) is processed with plasma(2). An electrode layer(3) is formed on the substrate. A photoresist layer is formed on the substrate. A negative pattern is formed on the photoresist layer. A seed layer(4) is formed on the electrode layer. A nano pillar is formed on the seed layer.;COPYRIGHT KIPO 2013