CRYO-PUMP CONTROL DEVICE, A CRYO-PUMP SYSTEM, AND A CRYO-PUMP MONITORING METHOD, CAPABLE OF EFFICIENTLY MONITORING THE DETERIORATION OF A CRYO-PUMP

摘要

PURPOSE: A cryo-pump control device, a cryo-pump system, and a cryo-pump monitoring method are provided to monitor the operation of a cryo-pump though a recycling process and deterioration state of the cryo-pump and to grasp accurate maintenance time.;CONSTITUTION: A cryo-pump control device comprises a cryo panel, a pumping container, and a deterioration determination unit(88). The cryo panel cools gas, thereby condensing or adsorbing the same. The pump container receives the cryo panel. The deterioration determination unit determines whether the number of re-purge operations, which is a sum of gas purge processes more than once being included in additional purge processes more than once, reaches a reference number for determining deterioration or not. The recycling process of the cryo-pump includes a basic purge process, one or more exhaustion processes, and additional purge processes.;COPYRIGHT KIPO 2013;[Reference numerals] (10) Cryo pump; (110) Vacuum pump; (60) Purge gas supply device; (70) Roughing Pump; (80) Cryo pump control device; (84) Exhaust process control unit; (86) Heat rising process control unit; (88) Deterioration determination unit; (90) Purge process control unit; (92) Basic purge process control unit; (94) Additional purge process control unit; (96) Transmitting unit