MANUFACTURING METHOD OF PATTERNED OCTAHEDRAL GOLD NANO-PARTICLE FILM USING ELECTRONIC BEAM IRRADIATION, THERMAL PROCESS AND WASHING AND A PATTERNED OCTAHEDRON GOLD NANO-PARTICLE FILM MANUFACTURED BY THE SAME

摘要

PURPOSE: A manufacturing method of patterned octahedral gold nano-particle film using electronic beam irradiation, thermal process and washing and a patterned octahedron gold nano-particle film manufactured by the same are provided to effectively manufacture gold precursor - copolymer film.;CONSTITUTION: A manufacturing method of patterned octahedral gold nano-particle film using electronic beam irradiation comprises the following steps: manufacturing a gold precursor - copolymer mixed solution by mixing gold precursors with copolymers; forming a composite film by coating the gold precursor-copolymer mixed solution on a substrate surface; forming a gold precursor - copolymer film which is patterned by selectively irradiating the gold precursor-copolymer film with electron beam and developing thereof; forming the octahedron gold nano-particle - copolymer film by heat-treating the patterned gold precursor - copolymer film; and manufacturing the octahedron gold nano-particle film by washing the patterned octahedron gold nano-particle copolymer film.;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Selective electromagnetic beam irradiation; (BB) Phenomenon; (CC) Patterned gold precursor-copolymer complex film; (DD) Heat treating; (EE) Copolymer film including octahedron gold nano-particle; (FF) Reactive ion etching; (GG) Carbon coated octahedron gold nano-particle film; (HH) Oxidation degradation; (II) Patterned octahedron gold nano-particle film