TRANSPARENT CONDUCTIVE ZNO THIN FILMS PREPARED BY ELECTROSPRAYING METHOD

摘要

PURPOSE: A manufacturing method for a Zno(zinc oxide) transparent conductive thin film is provided to improve permeability by doping aluminum in an oxidation zinc thin film using a simple method. CONSTITUTION: Zinc salt and aluminum salt are added to a solvent. A precursor solution is produced from the added solvent. The produced precursor solution is sprayed with electricity on a substrate. Zinc oxide sprayed to with electricity is deposited on the substrate. The substrate deposited with the zinc oxide is heat-treated at temperatures of 300C to 600C.