OPTICAL ABSORBING CELL DEVICE AND A DEPOSITION THICKNESS CONTROL SYSTEM USING THE SAME, CAPABLE OF CONTROLLING THE DEPOSITION THICKNESS OF A VAPORIZING GAS FOR A LONG PERIOD OF TIME WITHOUT FREQUENT REPLACEMENT OF A DEPOSITION THICKNESS CONTROL DEVICE

摘要

PURPOSE: A optical absorbing cell device for controlling the deposition thickness of a vaporizing material for a long period of time, and a deposition thickness control system using the same are provided to prevent hardening of the vaporizing material, thereby enabling a thin film deposition process for a long period of time such that the productivity of thin film manufacturing is largely improved.;CONSTITUTION: An optical absorbing cell device for controlling the deposition thickness of a vaporizing material for a long period of time includes an optical absorbing cell cover(31), a reflection mirrors(35a,35b), an optical injecting cable connector and an optical ejecting cable connector(33,38). The optical absorbing cell cover(31) is formed into a polygonal barrel. A discharging hole(h2) and an injecting hole(h1) are respectively formed on the upper portion and lower portion of the optical absorbing cell cover(31). A ray concealing devices(P2,P1) are respectively formed on the discharging hole(h2) and the injecting hole(h1). The reflecting mirrors(35a,35b) are arranged to be opposed to each other on the internal surface of the optical absorbing cell cover(31). The optical injecting cable connector and the optical ejecting cable connector(33,38) are respectively placed to be inclined to an upper portion and lower portion of one of the reflecting mirrors(35a,35b) at a certain angle(Θ). A parallel ray lens and an optical focusing lens(34,39) are respectively formed on the optical injecting cable connector and the optical ejecting cable connector(33,38).;COPYRIGHT KIPO 2013