METHOD FOR GROWING A SEMICONDUCTOR THIN FILM AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR LIGHT EMITTING DEVICE USING THE SAME CAPABLE OF IMPROVING PROCESSING EFFICIENCY

摘要

PURPOSE: A method for growing a semiconductor thin film and a method for manufacturing a semiconductor light emitting device using the same are provided to etch a material remaining within a gas supply part and to prevent nozzle jam.;CONSTITUTION: Multiple wafers are loaded in a wafer holder(20). The wafers are arranged in a reaction chamber(10). A gas supply part(30) is extended along the loading direction of the wafers. Reaction gas includes an organometallic compound. The reaction gas is spread on the wafers.;COPYRIGHT KIPO 2013