OPTIMIZED DIELECTRIC REFLECTIVE DIFFRACTION GRATING

摘要

The present invention comprises a stack of at least four planar dielectric material layer and the upper dielectric material layer, the diffraction and etching to form the grid, the preset period of the grating is etched, a method for obtaining a reflective grating that diffracts a light beam with a predetermined spectral range, for selecting the number of the dielectric material layer with the etching layer and the characteristic steps; For samples of the frequency spectrum belonging to Use for each of a predetermined diffraction grating composed of a dielectric material layers of at least four and the predetermined interval of the lattice parameters of the etching the at least one predetermined increment pitch while changing the thickness of the step of calculating at least one of the reflection and / or transmission efficiency of the diffraction orders digitally; And from among the calculated configurations, the present invention relates to a reflective diffraction grating, characterized in that to execute the step of selecting at least one of the configuration on the basis of the criteria for the use of the method for obtaining the supplied grid. ;