SUBSTRATE COATING APPARATUS, SUBSTRATE CONVEYANCE APPARATUS HAVING THE FUNCTION FOR FLOATING THE SURFACE AND THE METHOD OF CONVEYING FLOATING THE SUBSTRATE

摘要

PURPOSE: a kind of floatation type substrate coating apparatus is set to prevent pollution from spreading liquid, and the yield for reducing pitch time simultaneously to reduce the substrate of loss by providing mass substrate improves substrate. ;CONSTITUTION: a kind of equipment of floating type substrate coating, including workbench (100), guide rail (200), the first conveyance unit (300a), the second conveyance unit (300b). Multiple substrate theatrical circles float passes through specific height. One guide rail, the platform set on longitudinal platform two sides. The fixed each substrate of first and second conveyance units side and transfers substrate along guide rail each other. The theatrical circles of upper part is divided into central area and two side areas corresponds to guide rail. The center include it is multiple go out, import. Two include entrance. ;The 2013 of copyright KIPO submissions