ELECTRON PROXIMITY EFFECT CORRECTING METHOD USING AN OFF-CENTER SCATTERING FUNCTION CAPABLE OF CORRECTING THE SCATTERING EFFECT OF A FRONT AND A REAR BEAM

摘要

PURPOSE: Electron proximity effect correcting method using off-center scattering function is provided to solve a problem of proximity effect modeling deviation by using a model type of PSF without having a peak.;CONSTITUTION: A convolution of a point spread function of geometrical shapes of a target is used. A point spread function is concentrated on a beam. The point spread function uses Gaussian or exponential distribution law. One or more elements of the point spread function have a maximum value which is not positioned in the center of the beam. The maximum value is positioned at the rear scattering peak. The point spread function uses gamma distribution law.;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Absorbed energy(u,a)