SUBSTRATE DITCHING DEVICE FOR AUTOMATICALLY REMOVING SLUDGE FOR REDUCING MANPOWER AND EXPENSES REQUIRED FOR MAINTENANCE OF A FACILITY BY INCREASING A CLEANING PERIOD

摘要

PURPOSE: A substrate ditching device for automatically removing sludge is provided to remove the sludge included in etchant, thereby preventing malfunction of equipment, process errors, etc.;CONSTITUTION: A sludge removing unit(200) is installed between a first flow tube(230) and a second flow tube(240) which connect a bath and a tank. The sludge removing unit includes a chamber(210) and a plurality of filter members(212,214). The chamber provides a space in which etchant is filtered. Filter members are arranged to be separated in the chamber at constant intervals. Sludge(S) is ejected to the outside by opening a drain(220).;COPYRIGHT KIPO 2013