LED LIGHT SOURCE MODULE, LED LIGHT SOURCE APPARATUS AND LED LIGHT SOURCE APPARATUS MANAGEMENT SYSTEM FOR EXPOSURE RESIST

摘要

PURPOSE: An LED source module, an LED source device, and a system for managing the LED source device for an exposure process are provided to prevent damage due to the stop of a process line by modularizing a plurality of LED source units into a single LED source. CONSTITUTION: Light is transmitted from an LED source unit to a rod lens(114) through an optical fiber(113). The rod lens has a cross section to determine the shape of an exposure region. The rod lens integrates light emitted from the LED source unit and uniformly aligns the profile of the integrated light. The rod lens emits the aligned light with a cross section shape. [Reference numerals] (10) Exposure object; (AA,BB,CC,111) LED light source unit;