PRESSURE SENSOR WITH A NANOSTRUCTURE AND A MANUFACTURING METHOD THEREOF, CAPABLE OF IMPROVING A RESPONSE SPEED AND THE SENSITIVITY OF THE SENSOR

摘要

PURPOSE: A pressure sensor with a nanostructure and a manufacturing method thereof are provided to improve a response speed and the sensitivity of a sensor due to the nanostructure adhered to the surface of the sensor.;CONSTITUTION: A pressure sensor(100) with a nanostructure comprises a substrate(110), a source electrode(120), a drain electrode(130), and flexible sensor layer(140). The source and the drain electrodes are arranged separately on the substrate on a predetermined distance. The flexible sensor layer is arranged on the source and drain electrodes. The nanostructure adhered to a surface of the flexible sensor layer includes a zigzagged portions of a nano size.;COPYRIGHT KIPO 2013