MANUFACTURING METHOD OF THERMOCHROMIC GLASS CAPABLE OF MAINTAINING THERMOCHROMIC CHARACTERISTIC BY PREVENTING THE PHASE-CHANGE OF VANADIUM DIOXIDE DURING A MULTILAYERED FILM STRUCTURE FORMING PROCESS

摘要

PURPOSE: A manufacturing method of thermochromic glass is provided to improve the transmittance of the thermochromic glass by thermally treating a glass substrate, a first thin film, a vanadium metal thin film, and a second thin film laminate and forming a multilayered structure.;CONSTITUTION: A manufacturing method of thermochromic glass includes the following steps: a first thin film is coated on a glass substrate, and the refractive index of the first thin film is different from the refractive index of a vanadium dioxide thin film(S100); a pure vanadium metal is coated on the first thin film(S200); a second thin film is coated on the vanadium metal thin film, and the refractive index of the first thin film is different from the refractive index of the vanadium dioxide thin film(S300); and the glass substrate/the first thin film/the vanadium metal thin film/the second thin film laminate is thermally treated(S400). The pure vanadium metal is phase-changed into vanadium dioxide by the thermal treatment. The first and second thin films are transparent oxide thin films or transparent nitride thin films. The thermal treatment step is implemented under argon or vacuum atmosphere at 400-500 deg. C for 20-120 hours. The coating step for the first and second thin films is based on a reactive sputtering deposition method.;COPYRIGHT KIPO 2013;[Reference numerals] (S100) Coat a first thin film on a glass substrate; (S200) Coat a pure vanadium metal on the first thin film; (S300) Coat a second thin film on the vanadium metal thin film; (S400) Thermally treat the laminate of glass/First thin film/Vanadium metal/Second thin film