METHOD FOR FORMING AN OPTICAL WAVEGUIDE ON A SILICON WAFER CAPABLE OF REDUCING MANUFACTURING COSTS

摘要

PURPOSE: A method for forming an optical waveguide on a silicon wafer is provided to form an optical waveguide directly on a silicon wafer, thereby enabling manufacturing of an optical communication chip on the same wafer with a CPU or a memory chip and thus remarkably reducing manufacturing costs.;CONSTITUTION: A method comprises the steps of: forming a top insulation pattern(3a) on a substrate(1); forming a protrusion part(1a) by etching the substrate; forming a side insulation pattern(5a) which covers the side of the protrusion part; forming a core pattern(1c) which is surrounded with the top, the side, and a lower insulation patterns by forming the lower insulation pattern(5a) through thermal oxidation; and removing the top and side insulation patterns.;COPYRIGHT KIPO 2013