SUBSTRATE ALIGNMENT DEVICE FOR PREVENTING THE GENERATION OF ECONOMIC LOSS DUE TO THE DAMAGE CAUSED BY THE SEPARATION OF A SUBSTRATE USING A SUBSTRATE SEPARATION PREVENTING MEANS AND A SUBSTRATE INSPECTING DEVICE INCLUDING THE SAME

摘要

PURPOSE: A substrate align device and a substrate inspecting device including the same are provided to prevent a substrate from being separated from a stage unwillingly by a substrate separation preventing means.;CONSTITUTION: Multiple alignment arms (32) are arranged in the peripheral direction of a substrate in a regular interval for the alignment arms to be positioned at the peripheral side of a substrate placed at a stage. A horizontal driving unit (36) moves the alignment arms for the horizontal driving unit to control the multiple alignment arms to be close or distant from the periphery of the substrate. A hanging member (34) of the alignment arms prevents the separation of the substrate by hanging action with the substrate at the surface of the substrate when each of the alignment arms contacts the periphery of the substrate.;COPYRIGHT KIPO 2013