METHOD FOR CONTROLLING A SIZE OF THREE-DIMENSIONAL POLYDIMETHYLSILOXANE MOLDS/STAMPS, CAPABLE OF USING A THERMAL SHRINKAGE PROCESS WITHOUT BEING BROKEN OR TWISTED IN A FINE STRUCTURE

摘要

PURPOSE: A method for controlling a size of three-dimensional polydimethyl siloxane (PDMS) molds/stamps using a thermal shrinkage process is provided to allow various PDMS structures having other sizes, and to manufacture with various sizes by using a multi-phase thermal shrinkage process of a three dimension PDMS mold / stamp.;CONSTITUTION: A method for controlling a size of three-dimensional polydimethyl siloxane molds/stamps comprises the following steps: a polydimethylsiloxane (PDMS) reproduction mold is formed by performing a hardening treatment by injecting a PDMS solution into a silicon mold having a pattern of an embossment; the PDMS reproduction mold is contracted by cooling at a room temperature after the PDMS reproduction mold is heat-treated at 250-350°C; a PDMS stamp is manufactured by injecting the PDMS solution on a contracted PDMS reproduction mold and performing a hardening treatment; and the PDMS stamp is peeled from the PDMS reproduction mold.;COPYRIGHT KIPO 2013