INGOT GROWING APPARATUS AND A METHOD FOR MEASURING A MELT GAP, CAPABLE OF MINIMIZING THE QUALITY VARIATION OF A GROWN INGOT

摘要

PURPOSE: An ingot growing apparatus and a method for measuring a melt gap are provided to minimize measurement errors by including an interval measuring unit to measure the melt gap by using the brightness of light.;CONSTITUTION: A crucible (20) receives silicon melt. A heat shield (40) surrounds an ingot. A bar part (50) is arranged on the lower side of the heat shield. An interval measuring unit (62) measures an interval between the surface of the silicon melt and the lower side of the bar part. The interval measuring unit measures the diameter of the ingot by measuring the brightness of light.;COPYRIGHT KIPO 2013