PLASMA DETECTION APPARATUS ENABLING AN OPERATOR TO MONITOR THE SPECTRUM OF PLASMA IN REAL TIME, AN INDUCTIVELY COUPLED PLASMA MASS SPECTROMETER EQUIPPED WITH THE SAME, AND AN ANALYSIS METHOD OF CORRELATION BETWEEN PLASMA AND AN ION SIGNAL

摘要

PURPOSE: A plasma detection apparatus, an inductively coupled plasma mass spectrometer equipped with the same, and an analysis method of correlation between plasma and an ion signal are provided to spectrally analyze the plasma of a mass spectrometer and easily calculate the temperature or electron density of the plasma from a spectrum.;CONSTITUTION: An aerosol generation part (110) converts a sample to be analyzed into an aerosol state. An ionization part (120) is connected with the aerosol generation part in order to be supplied with the sample in an aerosol state. The ionization part is equipped with a plasma torch (122) in order to generate plasma. An analysis module (130) classifies ions, which are generated from the ionization part, by mass and electrically detects the ions. A spectrum generation part (210) generates a spectrum in order to detect the state of plasma. The spectrum generation part includes a collimator (211), a spectroscope (212), and an optical fiber (213).;COPYRIGHT KIPO 2013;[Reference numerals] (110) Aerosol generation part; (120) Ionization part; (130) Analysis module; (212) Spectroscope; (220) Calculation part; (230) Prediction part; (AA) Focus lens