CRYO-PUMP AND REPAIRING METHOD OF CRYO-PUMP

摘要

PROBLEM TO BE SOLVED: To provide a cryopump that can be more easily repaired.;SOLUTION: A cryopump 100 includes a housing 102, an electrical control unit 112 which controls the cryopump 100, a purge valve 104 provided on a flow passage between an external purge gas source and an inside of the housing 102, a rough valve 106 provided on a flow passage between an external pump and the inside of the housing 102, a vent valve 108 provided on a flow passage between the inside and an outside of the housing 102, and a Pirani gauge 110 for measuring a pressure inside the housing 102. The electrical control unit 112 is connected to each of the purge valve 104, rough valve 106, vent valve 108 and Pirani gauge 110 via wiring. Each wiring is provided with a connector on a member side and a connector on an electrical control unit side. The connector on the member side is configured to be attachable to and detachable from the connector on the electrical control unit side.;COPYRIGHT: (C)2013,JPO&INPIT