INSULATION SLEEVE FOR A CVD REACTOR AND THE CVD REACTOR INCLUDING THE SAME, CAPABLE OF REMOVING A STRONGLY ACIDIC ETCHING PROCESS FOR REUSE

摘要

PURPOSE: An insulation sleeve for a CVD reactor and the CVD reactor including the same are provided to improve the lifetime of the insulation sleeve by separately forming an insulation sleeve body and a separator for replacement.;CONSTITUTION: A main body (71) is composed of a body part (72) and a disk cover (73). The lower surface of the body part is arranged in contact with a substrate to surround an electrode. The disk cover is integrated with the upper surface of the body part. An insertion hole (731) through which the electrode passes is formed on the central part of the disk cover. A separator (75) is formed with a cylindrical or ring shape to surround the body part. The upper surface of the separator is in contact with the peripheral lower surface of the disk cover.;COPYRIGHT KIPO 2013