FUEL CELLS FOR INDUSTRIAL PLANT BACKUP POWER USING STOLEN HYDROGEN

摘要

PURPOSE: A fuel cell for industrial plant backup power using stealing processed hydrogen is provided to improve the quality of backup power by being integrated to a semiconductor fabrication. CONSTITUTION: AC power is delivered to a power controller with a power line (11). The power controller supplies normal power to an industrial process and generates a power failure signal when the normal power supply is stopped. The normal power is transmitted to an interface (17). The interface changes the normal power into proper power. The interface is distributed within the various members of a device. A fuel cell array (19) is connected to a smart meter (43) to steal hydrogen from a hydrogen reservoir after receiving power failure signal from a power controller. The fuel cell array is connected to the power controller to supply backup power to a critical industrial process after receiving the power failure signal. [Reference numerals] (13) Power controller; (15) Normal supply route; (17,21,25,29) Interface; (19) Battery array; (23) Fuel cell; (27) Diesel generator; (31) Process monitor; (41) Process controller