WORKPIECE CARRYING-IN-AND-OUT METHOD IN DOUBLE-END SURFACE GRINDING AND DOUBLE-END SURFACE GRINDER

摘要

PURPOSE: A method for carrying in/out workpieces in a double-end surface grinding process and a double-end surface grinder are provided to prevent the workpieces in a carrier from separating when the workpieces are carried in/out by adsorbing the workpieces in the carrier with a static pressure pad. CONSTITUTION: A double-end surface grinder comprises a carrier (7), static pressure pads (1, 2), grinding stones (5, 6), and carrying in/out units (8, 9). The carrier rotates a workpiece (W) in a thin plate shape. The static pressure pads maintain the workpiece inside the carrier by the static pressure. The static pressure pads include an adsorption hole (16) adsorbing the workpiece inside the carrier. The adsorption hole is positioned around a connection protrusion unit connected to a notch unit of the workpiece. The static pressure of the grinding stones is maintained by the static pressure pads. The grinding stones grind both sides of the workpiece rotated by the carrier. The carrying in/out units adsorb the workpiece and carry in/out it relative to a gap between a pair of static pressure pads. [Reference numerals] (19) Static pressure water source; (20) Pressure sensor; (21) Absorption unit; (22) Discharge unit; (32) Control valve circuit