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Electroless copper plating solution including anionic surfactant for wiring and copper coating layer prepared by the same

机译:包括用于布线的阴离子表面活性剂和由其制备的铜涂层的化学镀铜溶液

摘要

This invention is a copper ion , a copper ion complexing agent , a copper ion reducing agent , pH adjusting agent and the anionic addition catalyst by including a surfactant , 1) represents a layer possessing stress (Stress) , and bonding strength reduction effect by increasing the surface active effect 2) the main required properties of resistance decreases and the fine pores of the wiring trench application material (Void) and Sim (Seam ) relates to the amount of the diagram and wiring electroless copper whereby the prepared coating comprising an anionic surfactant which can be produced without defects such as a copper film . ;
机译:通过包含表面活性剂,本发明是铜离子,铜离子络合剂,铜离子还原剂,pH调节剂和阴离子加成催化剂,1)表示具有应力(Stress)的层,通过增加应力强度降低效果。表面活性效果2)所需的主要电阻特性降低,并且布线沟槽施加材料(Void)和Sim(Seam)的细孔与图的数量和布线化学铜有关,由此制得的包含阴离子表面活性剂的涂层可以生产没有缺陷的产品,如铜膜。 ;

著录项

  • 公开/公告号KR101224208B1

    专利类型

  • 公开/公告日2013-01-21

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20100132117

  • 发明设计人 이홍기;허진영;

    申请日2010-12-22

  • 分类号C23C18/40;C23C18/31;

  • 国家 KR

  • 入库时间 2022-08-21 16:25:49

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