首页>
外国专利>
Electroless copper plating solution including anionic surfactant for wiring and copper coating layer prepared by the same
Electroless copper plating solution including anionic surfactant for wiring and copper coating layer prepared by the same
展开▼
机译:包括用于布线的阴离子表面活性剂和由其制备的铜涂层的化学镀铜溶液
展开▼
页面导航
摘要
著录项
相似文献
摘要
This invention is a copper ion , a copper ion complexing agent , a copper ion reducing agent , pH adjusting agent and the anionic addition catalyst by including a surfactant , 1) represents a layer possessing stress (Stress) , and bonding strength reduction effect by increasing the surface active effect 2) the main required properties of resistance decreases and the fine pores of the wiring trench application material (Void) and Sim (Seam ) relates to the amount of the diagram and wiring electroless copper whereby the prepared coating comprising an anionic surfactant which can be produced without defects such as a copper film . ; 展开▼