PROCESS CONTROL MONITORS FOR INTERFEROMETRIC MODULATORS

摘要

micro-electromechanical systems (MEMS) device ( 108) for use in manufacturing the same process steps as those of the at least part of which is generated using the process described for the monitor and control ( 100, 102, 104 ) . Process control monitor may provide information about the component or sub- component of the characteristic of the micro-electromechanical system devices and micro-electromechanical systems device 108, an analysis of the ( 100, 102, 104 ) . This information to determine the error in the process , or by using micro-electromechanical system, it is possible to optimize the device 108. In some embodiments, the analysis of the process control monitor may use the optical measurement .