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Photosensitive resin composition for column spacer having enhanced storage stability, paten stiffness and strength of stability

机译:用于柱状间隔物的光敏树脂组合物,具有增强的储存稳定性,paten刚度和稳定性强度

摘要

PURPOSE: A photo-sensitive resin composition for a column spacer is provided to secure the excellent storage stability and development property, and to obtain a pattern with the wide upper diameter. CONSTITUTION: A photo-sensitive resin composition for a column spacer contains a copolymer A, and a copolymer B. The copolymer A contains 2-tetrahydropyranyl group containing polymerizable monomer marked with chemical formula 1, and an epoxy group-containing polymerizable monomer. In the chemical formula 1, R1 is either a hydrogen atom or an alkyl group with 1~5 carbons. The copolymer B contains a compound marked with chemical formula 2.
机译:目的:提供用于柱状间隔物的光敏树脂组合物,以确保优异的储存稳定性和显影性能,并获得具有宽上直径的图案。构成:一种用于柱状间隔物的光敏树脂组合物,包含共聚物A和共聚物B。共聚物A包含化学式为1的含2-四氢吡喃基的可聚合单体和含环氧基的可聚合单体。在化学式1中,R 1是氢原子或具有1-5个碳的烷基。共聚物B包含以化学式2标记的化合物。

著录项

  • 公开/公告号KR101238673B1

    专利类型

  • 公开/公告日2013-03-04

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20090046235

  • 申请日2009-05-27

  • 分类号C08L33/14;C08L33/06;C08F220/26;G03F7/004;

  • 国家 KR

  • 入库时间 2022-08-21 16:25:35

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