Optical Interferometer System with reduced vibrational noise properties

摘要

The present invention is to attenuate the vibration noise effects using the direct attachment of the membrane and part of the object to be measured with high resolution the shape measurement optical system relates to an optical interferometer system having a vibration attenuation characteristic noise effect to be achieved , has the object to be measured and a distance reference signal generating means which is to be attached spaced apart , and a reference signal that is reflected at each interface of the measurement object optical interferometer such that vibration and noise are canceled each other the measuring signal and the reference signal have the same vibration and noise and the measurement signal ; Using the optical interference signal from the light receiving optical interferometer for measuring the object to be measured ; and a ;