OPTICAL INTERFEROMETER SYSTEM HAVING VIBRATION NOISE ATTENUATING PROPERTIES BY CANCELLING IDENTICAL VIBRATION SIGNAL MEASURED BETWEEN A REFERENCE TERMINAL AND SAMPLE TERMINAL

摘要

PURPOSE: An optical interferometer system having vibration noise attenuating properties is provided to obtain a shape measurement system of high resolution because a vibration noise is attenuated by a directly attached partial reflective film to a measurement object.;CONSTITUTION: An optical interferometer system having vibration noise attenuating properties comprises an optical interferometer and a light receiving section. The optical interferometer has a reference signal generating member. The reference signal generating member is attached to be spaced from a measurement object(23,26) at a predetermined distance. The reference signals of the optical interferometer and measurement signals reflected from each boundary surface of the measurement object have identical vibrational noise. The vibrational noise of the reference signals and measurement signals of the optical interferometer attenuate each other. The light receiving unit measures the measurement object by using optical interference signals being transmitted from the optical interferometer system.;COPYRIGHT KIPO 2013;[Reference numerals] (AA,DD) Reference signal; (BB,EE) External sample signal; (CC,FF) Internal sample signal