SYSTEMS AND METHODS FOR UNIFORM SEQUENTIAL LATERAL SOLIDIFICATION OF THIN FILMS USING HIGH FREQUENCY LASERS

摘要

In one aspect, a method for processing a thin film is shaped in the first set from the first laser beam pulse is a step of generating the beamlets (beamlet), each beamlet of the first set of beamlets length which defines the y- direction, a width defining the x- direction, and the irradiated film substantially over the entire film thickness in the area sufficient to melt, and also having an energy density in the x- direction that is spaced apart from adjacent beamlets of the beamlets of the first set with a certain clearance, and the shaped beamlets generation step of the first set; include substantially parallel to the crystal grains in the x- direction, and the shaped beamlets, each of the length and width of substantially the same length and a width, the crystallized region adjacent to the gap and substantially separating the shaped beamlets in the same gap irradiating the first set of the first set of a first membrane region with the first set of shaped beamlets to form a molten zone of crystallizing upon cooling to form the side of which is separated from the crystallization zone; A step of generating a second set of shaped beamlets from a second laser beam pulse, each beamlet of the second set of beamlets is the length of each of the beamlets of the first set of beamlets, and a width, energy density and spacing substantially the same length, width, having an energy density and spacing, and the shaped beamlets generating step of the second set; To form a molten zone of the second set is shifted in the x- direction from the crystallized region of the first set, the method comprising: scanning the film is continuously irradiated to a second region of the film with the second set of shaped beamlets, said at least one molten zone of the second melt zone is at least partly overlapping the one of the crystallization zone of the crystallization region of the first set and to the at least one of crystallization upon cooling to form a continuous growth of the crystals in the crystallization zone includes the step of scanning.